The N2-HP-99N5-60 is a high-purity nitrogen generator using PSA carbon molecular sieve technology, delivering 99.9995% N2 at 60 Nm³/h. Designed for semiconductor applications with low operating cost.
| Model | N2-HP-99N5-60 |
| Purity | 99.9995% |
| Flow Rate | 60 Nm³/h |
| Pressure | 0.7 MPa |
| Dew Point | -70°C |
| Technology | PSA CARBON MOLECULAR SIEVE |
Multi-stage filtration pre-treatment removes oil vapor down to 0.003mg/m³.
Suitable for semiconductor, nitrogen blanketing, inerting, purging, and pneumatic conveying.